Ion Implantation - Science and Technology (2012)An updated Textbook about Ion Implantation in the Semiconductor Industry (Click on "Preview" below for extended details). The textbook covers both traditional ion implantation and also the current science problems and applications in CMOS technology. The chapters of the book include: History of Integrated Circuits & Ion Implantation Ion Implantation and Current and Future CMOS ICs Shallow Junctions Problems and Solutions Current Trends in Ion